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Erik Willem Bogaart
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, device manufacturing method and associated...
Patent number
11,169,447
Issue date
Nov 9, 2021
ASML Netherlands B.V.
Erik Willem Bogaart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask assembly
Patent number
11,009,803
Issue date
May 18, 2021
ASML Netherlands B.V.
Matthias Kruizinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and associated...
Patent number
10,754,258
Issue date
Aug 25, 2020
ASML Netherlands B.V.
Erik Willem Bogaart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system
Patent number
10,585,363
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Simon Gijsbert Josephus Mathijssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask assembly
Patent number
10,558,129
Issue date
Feb 11, 2020
ASML Netherlands B.V.
Matthias Kruizinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for monitoring a radiation source, radiation source, method...
Patent number
10,042,260
Issue date
Aug 7, 2018
ASML Netherlands B.V.
Erik Willem Bogaart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and associated...
Patent number
9,983,485
Issue date
May 29, 2018
ASML Netherlands B.V.
Erik Willem Bogaart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, substrates for use therein and dev...
Patent number
9,835,954
Issue date
Dec 5, 2017
ASML Netherlands B.V.
Erik Willem Bogaart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for measuring asymmetry of a microstructure, p...
Patent number
9,778,025
Issue date
Oct 3, 2017
ASML Netherlands B.V.
Simon Gijsbert Josephus Mathijssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,696,638
Issue date
Jul 4, 2017
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,229,340
Issue date
Jan 5, 2016
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
8,570,492
Issue date
Oct 29, 2013
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
Publication number
20200379358
Publication date
Dec 3, 2020
ASML NETHERLANDS B.V.
Erik Willem BOGAART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask Assembly
Publication number
20200057394
Publication date
Feb 20, 2020
ASML NETHERLANDS B.V.
Matthias KRUIZINGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask Assembly
Publication number
20180329314
Publication date
Nov 15, 2018
Matthias KRUIZINGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
Publication number
20180203368
Publication date
Jul 19, 2018
ASML NETHERLANDS B.V.
Erik Willem BOGAART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT SYSTEM
Publication number
20180149987
Publication date
May 31, 2018
ASML NETHERLANDS B.V.
Simon Gijsbert Josephus MATHIJSSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SYSTEM
Publication number
20180031982
Publication date
Feb 1, 2018
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G02 - OPTICS
Information
Patent Application
Device For Monitoring A Radiation Source, Radiation Source, Method...
Publication number
20170307978
Publication date
Oct 26, 2017
ASML NETHERLANDS B.V.
Erik Willem BOGAART
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
Publication number
20170184980
Publication date
Jun 29, 2017
ASML NETHERLANDS B.V.
Erik Willem BOGAART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20160109812
Publication date
Apr 21, 2016
ASML NETHERLANDS B.V.
Engelbertus Antonius Fransiscus VAN DER PASCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Method and Apparatus, Substrates for use Therein and Dev...
Publication number
20160097983
Publication date
Apr 7, 2016
ASML NETHERLANDS B.V.
Erik Willem BOGAART
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING ASYMMETRY OF A MICROSTRUCTURE, P...
Publication number
20150176979
Publication date
Jun 25, 2015
ASML NETHERLANDS B.V.
Simon Gijsbert Josephus Mathijssen
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20140022527
Publication date
Jan 23, 2014
ASML NETHERLANDS B.V.
Engelbertus Antonius Fransiscus VAN DER PASCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20120242969
Publication date
Sep 27, 2012
ASML NETHERLANDS B.V.
Engelbertus Antonius Fransiscus VAN DER PASCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY