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Eriko MASE

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  • Chigasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Thin substrate processing device
    • Patent number 10,370,757
    • Issue date Aug 6, 2019
    • Ulvac, Inc.
    • Tetsushi Fujinaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    THIN SUBSTRATE PROCESSING DEVICE
    • Publication number 20160376697
    • Publication date Dec 29, 2016
    • ULVAC, Inc.
    • Tetsushi Fujinaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PROCESSING DEVICE AND VACUUM PROCESSING METHOD
    • Publication number 20140158301
    • Publication date Jun 12, 2014
    • ULVAC, Inc.
    • Ken MAEHIRA
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL