Erina BABA

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
- Publication number 20240082885
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE POLISHING DEVICE
- Publication number 20230182262
- Publication date Jun 15, 2023
- EBARA CORPORATION
- ERINA BABA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
- Publication number 20220203411
- Publication date Jun 30, 2022
- EBARA CORPORATION
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20220168866
- Publication date Jun 2, 2022
- EBARA CORPORATION
- Erina Baba
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING CLEANING...
- Publication number 20220013352
- Publication date Jan 13, 2022
- Toshio Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PLANARIZING SUBSTRATE
- Publication number 20190143477
- Publication date May 16, 2019
- EBARA CORPORATION
- Erina BABA
- B24 - GRINDING POLISHING