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Erman Bengu
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San Jose, CA, US
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last 30 patents
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Patent Grant
Trench sidewall profile for device isolation
Patent number
6,514,805
Issue date
Feb 4, 2003
Intel Corporation
Daniel Xu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
TRENCH SIDEWALL PROFILE FOR DEVICE ISOLATION
Publication number
20030003681
Publication date
Jan 2, 2003
Daniel Xu
H01 - BASIC ELECTRIC ELEMENTS