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Ernst-Christian Richter
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Process for producing hard masks
Patent number
7,018,748
Issue date
Mar 28, 2006
InfineonTechnologies AG
Michael Sebald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for modifying resist structures and resist films from the a...
Patent number
6,899,997
Issue date
May 31, 2005
Infineon Technologies AG
Siew Siew Yip
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for structuring a photoresist layer
Patent number
6,887,653
Issue date
May 3, 2005
Infineon Technologies AG
Ernst-Christian Richter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist compound and method for structuring a photoresist layer
Patent number
6,841,332
Issue date
Jan 11, 2005
Infineon Technology AG
Gertrud Falk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for experimentally verifying imaging errors in photomasks
Patent number
6,800,407
Issue date
Oct 5, 2004
Infineon Technologies AG
Günther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of structuring a photoresist layer
Patent number
6,746,821
Issue date
Jun 8, 2004
Infineon Technologies AG
Ernst-Christian Richter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for structuring a photoresist layer
Patent number
6,746,828
Issue date
Jun 8, 2004
Infineon Technologies AG
Ernst-Christian Richter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Process for structuring a photoresist layer
Patent number
6,746,827
Issue date
Jun 8, 2004
Infineon Technologies AG
Ernst-Christian Richter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for structuring a photoresist layer
Patent number
6,743,572
Issue date
Jun 1, 2004
Infineon Technologies AG
Ernst Christian Richter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for structuring a photoresist layer
Patent number
6,740,475
Issue date
May 25, 2004
Infineon Technologies AG
Ernst-Christian Richter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for producing resist structures
Patent number
6,703,190
Issue date
Mar 9, 2004
Infineon Technologies AG
Klaus Elian
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for experimentally verifying imaging errors in optical expos...
Patent number
6,696,208
Issue date
Feb 24, 2004
Infineon Technologies AG
Günther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Optical device for use with a lithography method
Publication number
20040169834
Publication date
Sep 2, 2004
Infineon Technologies AG
Ernst-Christian Richter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process for modifying resist structures and resist films from the a...
Publication number
20030211422
Publication date
Nov 13, 2003
Siew Siew Yip
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process for producing hard masks
Publication number
20030203314
Publication date
Oct 30, 2003
Michael Sebald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for experimentally verifying imaging errors in optical expos...
Publication number
20030054268
Publication date
Mar 20, 2003
Gunther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photoresist compound and method for structuring a photoresist layer
Publication number
20030022111
Publication date
Jan 30, 2003
Gertrud Falk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for experimentally verifying imaging errors in photomasks
Publication number
20030013022
Publication date
Jan 16, 2003
Gunther Czech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for producing resist structures
Publication number
20030008240
Publication date
Jan 9, 2003
Klaus Elian
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Method for structuring a photoresist layer
Publication number
20020187436
Publication date
Dec 12, 2002
Ernst-Christian Richter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for structuring a photoresist layer
Publication number
20020160318
Publication date
Oct 31, 2002
Ernst-Christian Richter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Process for structuring a photoresist layer
Publication number
20020160316
Publication date
Oct 31, 2002
Ernst-Christian Richter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Process for structuring a photoresist layer
Publication number
20020160315
Publication date
Oct 31, 2002
Ernst-Christian Richter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Method for structuring a photoresist layer
Publication number
20020160317
Publication date
Oct 31, 2002
Ernst-Christian Richter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of structuring a photoresist layer
Publication number
20020058425
Publication date
May 16, 2002
Ernst-Christian Richter
H01 - BASIC ELECTRIC ELEMENTS