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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,013,981
- Issue date Sep 6, 2011
- ASML Netherlands B.V.
- Hendrik Antony Johannes Neerhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080309912
- Publication date Dec 18, 2008
- ASML NETHERLANDS B.V.
- Hendrik Antony Johannes Neerhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY