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Ernst Haugeneder
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Vienna, AT
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Patents Grants
last 30 patents
Information
Patent Grant
Large-area membrane mask and method for fabricating the mask
Patent number
6,835,508
Issue date
Dec 28, 2004
Infineon Technologies AG
Jörg Butschke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of producing a perforated mask for particle radiation
Patent number
6,773,854
Issue date
Aug 10, 2004
Infineon Technologies AG
Albrecht Ehrmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating positionally exact surface-wide membrane masks
Patent number
6,696,371
Issue date
Feb 24, 2004
Infineon Technologies AG
Joerg Butschke
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic method for producing an exposure pattern on a substrate
Patent number
6,472,673
Issue date
Oct 29, 2002
IMS-Ionen Mikrofabrikations Systeme GmbH
Alfred Chalupka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method of producing a perforated mask for particle radiation
Publication number
20030059689
Publication date
Mar 27, 2003
Albrecht Ehrmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Large-area membrane mask and method for fabricating the mask
Publication number
20030031939
Publication date
Feb 13, 2003
Jorg Butschke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for fabricating positionally exact surface-wide membrane masks
Publication number
20020182895
Publication date
Dec 5, 2002
Joerg Butschke
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Thermal control of image pattern distortions
Publication number
20020148976
Publication date
Oct 17, 2002
Alfred Chalupka
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic imaging of a structure pattern onto one or more fields...
Publication number
20010036588
Publication date
Nov 1, 2001
IMS-Ionen Mikrofabrikations Systeme GmbH
Herbert Buschbeck
B82 - NANO-TECHNOLOGY