Ernst Hegels

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Kirchheim b. Munchen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor wafer inspection system and method
- Patent number 9,182,357
- Issue date Nov 10, 2015
- Nanda Technologies GmbH
- Lars Markwort
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER INSPECTION SYSTEM AND METHOD
- Publication number 20120268585
- Publication date Oct 25, 2012
- Lars Markwort
- G01 - MEASURING TESTING