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Ernst Keller

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  • Sunnyvale, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    DIFFUSER GRAVITY SUPPORT
    • Publication number 20090007846
    • Publication date Jan 8, 2009
    • ERNST KELLER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS SEALING SKIRT FOR SUSPENDED SHOWERHEAD IN PROCESS CHAMBER
    • Publication number 20080099145
    • Publication date May 1, 2008
    • Applied Materials, Inc.
    • ERNST KELLER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUSPENSION FOR SHOWERHEAD IN PROCESS CHAMBER
    • Publication number 20080099146
    • Publication date May 1, 2008
    • Applied Materials, Inc.
    • ERNST KELLER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RF CURRENT RETURN PATH FOR A LARGE AREA SUBSTRATE PLASMA REACTOR
    • Publication number 20060231029
    • Publication date Oct 19, 2006
    • Wendell Blonigan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Diffuser gravity support
    • Publication number 20060060138
    • Publication date Mar 23, 2006
    • APPLIED MATERIALS, INC.
    • Ernst Keller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD susceptor support construction
    • Publication number 20060054090
    • Publication date Mar 16, 2006
    • APPLIED MATERIALS, INC.
    • Shinichi Kurita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Shadow frame with mask panels
    • Publication number 20060011137
    • Publication date Jan 19, 2006
    • APPLIED MATERIALS, INC.
    • Ernst Keller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Suspended gas distribution manifold for plasma chamber
    • Publication number 20050000432
    • Publication date Jan 6, 2005
    • APPLIED MATERIALS, INC.
    • Ernst Keller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RF current return path for a large area substrate plasma reactor
    • Publication number 20040250955
    • Publication date Dec 16, 2004
    • APPLIED MATERIALS, INC.
    • Wendell Blonigan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Flexibly suspended gas distribution manifold for plasma chamber
    • Publication number 20040118345
    • Publication date Jun 24, 2004
    • APPLIED MATERIALS, INC.
    • John M. White
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate transfer shuttle
    • Publication number 20030190220
    • Publication date Oct 9, 2003
    • Applied Komatsu Technology, Inc.
    • John M. White
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Application

    Flexibly suspended gas distribution manifold for plasma chamber
    • Publication number 20030066607
    • Publication date Apr 10, 2003
    • APPLIED MATERIALS, INC.
    • John M. White
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Susceptor shaft vacuum pumping
    • Publication number 20030026904
    • Publication date Feb 6, 2003
    • APPLIED MATERIALS, INC.
    • Sanjay Yadav
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Suspended gas distribution manifold for plasma chamber
    • Publication number 20020069968
    • Publication date Jun 13, 2002
    • Ernst Keller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...