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Ernst Kratschmer
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Yorktown Heights, NY, US
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last 30 patents
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Patent Grant
Electron beam lithography with dynamic fin overlay correction
Patent number
12,099,304
Issue date
Sep 24, 2024
International Business Machines Corporation
Simon Dawes
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam lithography with dynamic fin overlay correction
Patent number
11,852,975
Issue date
Dec 26, 2023
International Business Machines Corporation
Simon Dawes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
High-aspect ratio resist development using safe-solvent mixtures of...
Patent number
6,440,639
Issue date
Aug 27, 2002
International Business Machines Corporation
Robert E. Fontana
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
ELECTRON BEAM LITHOGRAPHY WITH DYNAMIC FIN OVERLAY CORRECTION
Publication number
20240061342
Publication date
Feb 22, 2024
International Business Machines Corporation
Simon DAWES
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTRON BEAM LITHOGRAPHY WITH DYNAMIC FIN OVERLAY CORRECTION
Publication number
20220013362
Publication date
Jan 13, 2022
International Business Machines Corporation
Simon DAWES
H01 - BASIC ELECTRIC ELEMENTS