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Jiangsu, CN
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Patents Grants
last 30 patents
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Patent Grant
Method for manufacturing MEMS double-layer suspension microstructur...
Patent number
10,301,175
Issue date
May 28, 2019
CSMC Technologies Fab1 Co., Ltd.
Errong Jing
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS double-layer suspension microstructure manufacturing method, a...
Patent number
10,093,536
Issue date
Oct 9, 2018
CSMC Technologies FAB2 Co., Ltd.
Errong Jing
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Positioning method in microprocessing process of bulk silicon
Patent number
9,902,613
Issue date
Feb 27, 2018
CSMC TECHNOLOGIES FAB1 CO., LTD.
Errong Jing
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing thin-film support beam
Patent number
9,862,595
Issue date
Jan 9, 2018
CSMC Technologies FAB1 Co., Ltd.
Errong Jing
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DOUBLE-LAYER SUSPENSION MICROSTRUCTURE MANUFACTURING METHOD, A...
Publication number
20180134548
Publication date
May 17, 2018
CSMC TECHNOLOGIES FAB2 CO., LTD.
Errong JING
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS DOUBLE-LAYER SUSPENSION MICROSTRUCTUR...
Publication number
20170203960
Publication date
Jul 20, 2017
CSMC TECHNOLOGIES FAB1 CO., LTD.
Errong JING
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS TORSIONAL ELECTROSTATIC ACTUATOR
Publication number
20170174508
Publication date
Jun 22, 2017
CSMC TECHNOLOGIES FAB1 CO., LTD.
Errong JING
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
POSITIONING METHOD IN MICROPROCESSING PROCESS OF BULK SILICON
Publication number
20170113930
Publication date
Apr 27, 2017
CSMC TECHNOLOGIES FAB1 CO., LTD.
Errong JING
B81 - MICRO-STRUCTURAL TECHNOLOGY