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Wuxi New District, CN
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last 30 patents
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Patent Grant
Method for manufacturing MEMS torsional electrostatic actuator
Patent number
9,834,437
Issue date
Dec 5, 2017
CSMC Technologies Fabi Co., Ltd.
Errong Jing
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM
Publication number
20160229691
Publication date
Aug 11, 2016
CSMC TECHNOLOGIES FABI CO., LTD.
Errong JING
B81 - MICRO-STRUCTURAL TECHNOLOGY