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Erwin Bugl
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St. Radegund, AT
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Patent Grant
Method for the deposition of pure semiconductor material
Patent number
4,311,545
Issue date
Jan 19, 1982
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
Erwin Bugl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...