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Erwin Theodorus Jacoba Verhagen
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Veldhoven, NL
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last 30 patents
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Patent Grant
Particle detection device, lithographic apparatus and device manufa...
Patent number
7,283,225
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Johannes Onvlee
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Substrate Processing Apparatus and Device Manufacturing Method
Publication number
20090148604
Publication date
Jun 11, 2009
ASML NETHERLANDS B.V.
Raimond VISSER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY