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Erwin Wijn
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Eindhoven, NL
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last 30 patents
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Patent Grant
Planar motor and lithographic apparatus comprising such planar motor
Patent number
9,172,294
Issue date
Oct 27, 2015
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
PLANAR MOTOR AND LITHOGRAPHIC APPARATUS COMPRISING SUCH PLANAR MOTOR
Publication number
20120249991
Publication date
Oct 4, 2012
ASML NETHERLANDS B.V.
Sven Antoin Johan HOL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY