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Esen Salcin
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Milpitas, CA, US
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last 30 patents
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Patent Grant
Methods and systems for co-located metrology
Patent number
10,804,167
Issue date
Oct 13, 2020
KLA-Tencor Corporation
David Y. Wang
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Single wavelength ellipsometry with improved spot size capability
Patent number
9,574,992
Issue date
Feb 21, 2017
KLA-Tencor Corporation
Esen Salcin
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Methods And Systems For Co-Located Metrology
Publication number
20200243400
Publication date
Jul 30, 2020
KLA-Tencor Corporation
David Y. Wang
G06 - COMPUTING CALCULATING COUNTING