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Ethan C. Wilson
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Conditioner assembly and a conditioner back support for a chemical...
Patent number
6,322,429
Issue date
Nov 27, 2001
Mosel Vitelic, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad shaping and patterning
Patent number
6,315,857
Issue date
Nov 13, 2001
Mosel Vitelic, Inc.
Tsungnan Cheng
B24 - GRINDING POLISHING
Information
Patent Grant
Linear pad conditioning apparatus
Patent number
6,149,512
Issue date
Nov 21, 2000
Aplex, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer carrier head with inflatable bladder and attack angle control...
Patent number
6,080,040
Issue date
Jun 27, 2000
Aplex Group
Gregory A. Appel
B24 - GRINDING POLISHING
Information
Patent Grant
Conditioner assembly for a chemical mechanical polishing apparatus
Patent number
6,042,457
Issue date
Mar 28, 2000
Aplex, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING