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Etsuji ITO

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  • Kurokawa-gun, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190096639
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Shuichi TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    POWER FEED MEMBER AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20180374679
    • Publication date Dec 27, 2018
    • TOKYO ELECTRON LIMITED
    • Shunichi Ito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING DEVICE AND PROCESSING METHOD
    • Publication number 20180114717
    • Publication date Apr 26, 2018
    • TOKYO ELECTRON LIMITED
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20170162367
    • Publication date Jun 8, 2017
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20170103877
    • Publication date Apr 13, 2017
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD OF MULTILAYER FILM
    • Publication number 20150072534
    • Publication date Mar 12, 2015
    • TOKYO ELECTRON LIMITED
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20140346040
    • Publication date Nov 27, 2014
    • Akihiro Yokota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING DEVICE AND PROCESSING METHOD
    • Publication number 20140213055
    • Publication date Jul 31, 2014
    • TOKYO ELECTRON LIMITED
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD OF MULTILAYER FILM
    • Publication number 20140206199
    • Publication date Jul 24, 2014
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20130220547
    • Publication date Aug 29, 2013
    • TOKYO ELECTRON LIMITED
    • Kazuya NAGASEKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSFER APPARATUS AND PLASMA PROCESSING SYSTEM
    • Publication number 20130062016
    • Publication date Mar 14, 2013
    • TOKYO ELECTRON LIMITED
    • Shinji HIMORI
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20050011452
    • Publication date Jan 20, 2005
    • TOKYO ELECTRON LIMITED
    • Toshihiro Hayami
    • H01 - BASIC ELECTRIC ELEMENTS