Etsuko Kubo

Person

Hikari, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ultrasonic cleaning method
- Patent number 10,137,483
- Issue date Nov 27, 2018
- Siltronic AG
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaning method and ultrasonic cleaning apparatus
- Patent number 9,773,688
- Issue date Sep 26, 2017
- Siltronic AG
- Teruo Haibara
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaning method
- Patent number 9,662,687
- Issue date May 30, 2017
- Siltronic AG
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaning method and ultrasonic cleaning apparatus
- Patent number 9,457,385
- Issue date Oct 4, 2016
- Siltronic AG
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Grant
Dissolved nitrogen concentration monitoring method, substrate clean...
- Patent number 8,778,085
- Issue date Jul 15, 2014
- Siltronic AG
- Teruo Haibara
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus, measurement method and calibration method
- Patent number 8,575,571
- Issue date Nov 5, 2013
- Siltronic AG
- Teruo Haibara
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ULTRASONIC CLEANING METHOD
- Publication number 20160236242
- Publication date Aug 18, 2016
- Siltronic AG
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING METHOD
- Publication number 20160052025
- Publication date Feb 25, 2016
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS
- Publication number 20130312785
- Publication date Nov 28, 2013
- Siltronic AG
- Teruo Haibara
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS
- Publication number 20130312786
- Publication date Nov 28, 2013
- Siltronic AG
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS
- Publication number 20130312789
- Publication date Nov 28, 2013
- Siltronic AG
- Masashi Uchibe
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS
- Publication number 20130312788
- Publication date Nov 28, 2013
- Siltronic AG
- Etsuko Kubo
- B08 - CLEANING
Information Patent Application
DISSOLVED NITROGEN CONCENTRATION MONITORING METHOD, SUBSTRATE CLEAN...
- Publication number 20130263887
- Publication date Oct 10, 2013
- Siltronic AG
- Teruo Haibara
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS, EQUIPMENT, AND METHOD
- Publication number 20130192628
- Publication date Aug 1, 2013
- Siltronic AG
- Yoshihiro Mori
- B08 - CLEANING
Information Patent Application
CLEANING METHOD
- Publication number 20130192627
- Publication date Aug 1, 2013
- Siltronic AG
- Etsuko Kubo
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING METHOD
- Publication number 20130160791
- Publication date Jun 27, 2013
- Siltronic AG
- Teruo Haibara
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
CLEANING APPARATUS, MEASUREMENT METHOD AND CALIBRATION METHOD
- Publication number 20130112900
- Publication date May 9, 2013
- Siltronic AG
- Teruo Haibara
- G01 - MEASURING TESTING

Etsuko Kubo

Person

Patents Grantslast 30 patents

Ultrasonic cleaning method

Ultrasonic cleaning method and ultrasonic cleaning apparatus

Ultrasonic cleaning method

Ultrasonic cleaning method and ultrasonic cleaning apparatus

Dissolved nitrogen concentration monitoring method, substrate clean...

Cleaning apparatus, measurement method and calibration method

Patents Applicationslast 30 patents

ULTRASONIC CLEANING METHOD

ULTRASONIC CLEANING METHOD

ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS

ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS

ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS

ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS

DISSOLVED NITROGEN CONCENTRATION MONITORING METHOD, SUBSTRATE CLEAN...

CLEANING APPARATUS, EQUIPMENT, AND METHOD

CLEANING METHOD

ULTRASONIC CLEANING METHOD

CLEANING APPARATUS, MEASUREMENT METHOD AND CALIBRATION METHOD