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Etsuo Fukuda
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Yokohama-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor processing process control system and its control method
Patent number
6,853,870
Issue date
Feb 8, 2005
Kabushiki Kaisha Toshiba
Shoichi Harakawa
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Semiconductor processing process control system and its control method
Patent number
6,745,094
Issue date
Jun 1, 2004
Kabushiki Kaisha Toshiba
Shoichi Harakawa
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Production/manufacturing planning system
Patent number
6,546,300
Issue date
Apr 8, 2003
Kabushiki Kaisha Toshiba
Etsuo Fukuda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Production system for manufacturing semiconductor devices by lot
Patent number
6,463,350
Issue date
Oct 8, 2002
Kabushiki Kaisha Toshiba
Etsuo Fukuda
G05 - CONTROLLING REGULATING
Information
Patent Grant
Production scheduling management system, and method of managing pro...
Patent number
6,438,436
Issue date
Aug 20, 2002
Kabushiki Kaisha Toshiba
Shinichi Hohkibara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor product manufacturing execution system and semiconduc...
Patent number
6,112,130
Issue date
Aug 29, 2000
Kabushiki Kaisha Toshiba
Etsuo Fukuda
G05 - CONTROLLING REGULATING
Information
Patent Grant
Semiconductor production system
Patent number
5,694,325
Issue date
Dec 2, 1997
Kabushiki Kaisha Toshiba
Etsuo Fukuda
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor processing process control system and its control method
Publication number
20040186610
Publication date
Sep 23, 2004
Kabushiki Kaisha Toshiba
Shoichi Harakawa
G05 - CONTROLLING REGULATING
Information
Patent Application
PRODUCTION SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICES BY LOT
Publication number
20020013632
Publication date
Jan 31, 2002
ETSUO FUKUDA
G05 - CONTROLLING REGULATING