Etsuo Wani

Person

Fuchu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
CVD apparatus and method of cleaning the CVD apparatus
- Patent number 8,277,560
- Issue date Oct 2, 2012
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for cleaning CVD device and method of cleaning CVD device
- Patent number 8,043,438
- Issue date Oct 25, 2011
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning CVD device and cleaning device therefor
- Patent number 6,935,351
- Issue date Aug 30, 2005
- Anelva Corporation
- Koji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching apparatus and method
- Patent number 5,087,341
- Issue date Feb 11, 1992
- Anelva Corporation
- Tsutomu Tsukada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching apparatus comprising etching chambers of different etch...
- Patent number 4,482,419
- Issue date Nov 13, 1984
- Anelva Corporation
- Tsutomu Tsukada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Device for cleaning cvd device and method of cleaning cvd device
- Publication number 20060207630
- Publication date Sep 21, 2006
- RESEARCH INST. OF INNOVATIVE TECH. FOR THE EARTH
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus and method for cleaning cvd apparatus
- Publication number 20060201533
- Publication date Sep 14, 2006
- RESEARCH INST. OF INNOVATIVE TECH. FOR THE EARTH
- Etsuo Wani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus having means for cleaning with fluorine gas and metho...
- Publication number 20050252451
- Publication date Nov 17, 2005
- Tatsuro Beppu
- B08 - CLEANING
Information Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
- Publication number 20040255854
- Publication date Dec 23, 2004
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
- Publication number 20040250775
- Publication date Dec 16, 2004
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning cvd device and cleaning device therefor
- Publication number 20030079757
- Publication date May 1, 2003
- Koji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

CVD apparatus and method of cleaning the CVD apparatus

Device for cleaning CVD device and method of cleaning CVD device

Method of cleaning CVD device and cleaning device therefor

Dry etching apparatus and method

Dry etching apparatus comprising etching chambers of different etch...

Patents Applicationslast 30 patents

Device for cleaning cvd device and method of cleaning cvd device

Cvd apparatus and method for cleaning cvd apparatus

Cvd apparatus having means for cleaning with fluorine gas and metho...

Cvd apparatus and method of cleaning the cvd apparatus

Cvd apparatus and method of cleaning the cvd apparatus

Method of cleaning cvd device and cleaning device therefor