Etsuo Yamagishi

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Matching unit for semiconductor plasma processing apparatus
- Patent number 7,132,040
- Issue date Nov 7, 2006
- Pearl Kogyo Co., Ltd.
- Etsuo Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Matching unit for semiconductor plasma processing apparatus
- Publication number 20050098116
- Publication date May 12, 2005
- Etsuo Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS