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Eugene O. Degenkolb
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Newton, MA, US
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last 30 patents
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Patent Grant
Method and apparatus for processing substrate edges
Patent number
8,658,937
Issue date
Feb 25, 2014
UVTech Systems, Inc.
Kenneth J. Harte
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Method and apparatus for processing substrate edges
Patent number
8,410,394
Issue date
Apr 2, 2013
UVTech Systems, Inc.
Ronald P. Millman
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Laser doping
Publication number
20110185971
Publication date
Aug 4, 2011
UVTech Systems, Inc.
David J. Elliott
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
Publication number
20110168672
Publication date
Jul 14, 2011
UVTech Systems, Inc.
Kenneth J. Harte
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MODULAR APPARATUS FOR WAFER EDGE PROCESSING
Publication number
20110147350
Publication date
Jun 23, 2011
UVTech Systems Inc.
Ronald P. Millman, JR.
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
Publication number
20110139757
Publication date
Jun 16, 2011
Ronald P. Millman, JR.
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR