Eugene Shifrin

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High efficiency laser-sustained plasma light source with collection...
- Patent number 11,778,720
- Issue date Oct 3, 2023
- KLA Corporation
- Matthew Derstine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Print check repeater defect detection
- Patent number 11,328,411
- Issue date May 10, 2022
- KLA Corp.
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Repeater defect detection
- Patent number 11,204,332
- Issue date Dec 21, 2021
- KLA-Tencor Corporation
- Eugene Shifrin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Differential imaging for single-path optical wafer inspection
- Patent number 11,138,722
- Issue date Oct 5, 2021
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, method and non-transitory computer readable medium for tuni...
- Patent number 11,139,216
- Issue date Oct 5, 2021
- KLA-Tencor Corporation
- David Craig Oram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 10,976,025
- Issue date Apr 13, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency laser-sustained plasma light source
- Patent number 10,887,974
- Issue date Jan 5, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Neutral atom imaging system
- Patent number 10,714,307
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for pumping laser sustained plasma and enhancing...
- Patent number 10,714,327
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
System, method and non-transitory computer readable medium for tuni...
- Patent number 10,679,909
- Issue date Jun 9, 2020
- KLA-Tencor Corporation
- David Craig Oram
- G01 - MEASURING TESTING
Information Patent Grant
Repeater defect detection
- Patent number 10,648,925
- Issue date May 12, 2020
- KLA-Tencor Corporation
- Eugene Shifrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 10,520,741
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
High sensitivity repeater defect detection
- Patent number 10,395,358
- Issue date Aug 27, 2019
- KLA-Tencor Corp.
- Bjorn Brauer
- G01 - MEASURING TESTING
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,381,216
- Issue date Aug 13, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,217,625
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,163,620
- Issue date Dec 25, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 9,927,094
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Array mode repeater detection
- Patent number 9,766,186
- Issue date Sep 19, 2017
- KLA-Tencor Corp.
- Hong Chen
- G01 - MEASURING TESTING
Information Patent Grant
Repeater detection
- Patent number 9,766,187
- Issue date Sep 19, 2017
- KLA-Tencor Corp.
- Hong Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and method for enhanced defect detection with a digital matc...
- Patent number 9,734,422
- Issue date Aug 15, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect detection using structural information
- Patent number 9,727,047
- Issue date Aug 8, 2017
- KLA-Tencor Corp.
- Qing Luo
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 9,709,811
- Issue date Jul 18, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
Detecting defects on a wafer
- Patent number 9,355,208
- Issue date May 31, 2016
- KLA-Tencor Corp.
- Eugene Shifrin
- G01 - MEASURING TESTING
Information Patent Grant
Inspection recipe setup from reference image variation
- Patent number 9,262,821
- Issue date Feb 16, 2016
- KLA-Tencor Corp.
- Eugene Shifrin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer inspection using free-form care areas
- Patent number 9,171,364
- Issue date Oct 27, 2015
- KLA-Tencor Corp.
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated inspection scenario generation
- Patent number 9,053,390
- Issue date Jun 9, 2015
- KLA-Tencor Corporation
- Mohan Mahadevan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-wavelength pumping to sustain hot plasma
- Patent number 8,698,399
- Issue date Apr 15, 2014
- KLA-Tencor Corporation
- Ilya V. Bezel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Methods for accurate identification of an edge of a care area for a...
- Patent number 8,213,705
- Issue date Jul 3, 2012
- KLA-Tencor Technologies Corp.
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for determining a position of inspection data i...
- Patent number 8,041,103
- Issue date Oct 18, 2011
- KLA-Tencor Technologies Corp.
- Ashok Kulkarni
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods for accurate identification of an edge of a care area for a...
- Patent number 7,894,659
- Issue date Feb 22, 2011
- KLA-Tencor Technologies Corp.
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
MULTIMODE DEFECT DETECTION
- Publication number 20240161272
- Publication date May 16, 2024
- KLA Corporation
- Sangbong Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PRINT CHECK REPEATER DEFECT DETECTION
- Publication number 20210342992
- Publication date Nov 4, 2021
- KLA Corporation
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20210231292
- Publication date Jul 29, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20210022233
- Publication date Jan 21, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...
- Publication number 20200258792
- Publication date Aug 13, 2020
- KLA-Tencor Corporation
- David Craig Oram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Repeater Defect Detection
- Publication number 20200240928
- Publication date Jul 30, 2020
- KLA-Tencor Corporation
- Eugene Shifrin
- G01 - MEASURING TESTING
Information Patent Application
Differential Imaging For Single-Path Optical Wafer Inspection
- Publication number 20200202504
- Publication date Jun 25, 2020
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Neutral Atom Imaging System
- Publication number 20190378684
- Publication date Dec 12, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma and Enhancing...
- Publication number 20190287785
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20190115203
- Publication date Apr 18, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Repeater Defect Detection
- Publication number 20180348147
- Publication date Dec 6, 2018
- KLA-Tencor Corporation
- Eugene Shifrin
- G01 - MEASURING TESTING
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20180172240
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...
- Publication number 20180144996
- Publication date May 24, 2018
- KLA-Tencor Corporation
- David Craig Oram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SENSITIVITY REPEATER DEFECT DETECTION
- Publication number 20180130199
- Publication date May 10, 2018
- KLA-Tencor Corporation
- Bjorn Brauer
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20170315369
- Publication date Nov 2, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20160381776
- Publication date Dec 29, 2016
- KLA-Tencor Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20160268120
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Enhanced Defect Detection with a Digital Matc...
- Publication number 20160140412
- Publication date May 19, 2016
- KLA-Tencor Corporation
- Pavel Kolchin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Detection Using Structural Information
- Publication number 20160104600
- Publication date Apr 14, 2016
- KLA-Tencor Corporation
- Qing Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Repeater Detection
- Publication number 20160061745
- Publication date Mar 3, 2016
- KLA-Tencor Corporation
- Hong Chen
- G01 - MEASURING TESTING
Information Patent Application
Array Mode Repeater Detection
- Publication number 20160061749
- Publication date Mar 3, 2016
- KLA-Tencor Corporation
- Hong Chen
- G01 - MEASURING TESTING
Information Patent Application
Inspection Recipe Setup from Reference Image Variation
- Publication number 20150324964
- Publication date Nov 12, 2015
- KLA-Tencor Corporation
- Eugene Shifrin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20150049778
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Detecting Repeating Defects on Semiconducto...
- Publication number 20150012900
- Publication date Jan 8, 2015
- KLA-Tencor Corporation
- Eugene Shifrin
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection Using Free-Form Care Areas
- Publication number 20140376802
- Publication date Dec 25, 2014
- KLA-Tencor Corporation
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Automated Inspection Scenario Generation
- Publication number 20140050389
- Publication date Feb 20, 2014
- KLA-Tencor Corporation
- Mohan Mahadevan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20130181595
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
Multi-Wavelength Pumping to Sustain Hot Plasma
- Publication number 20110291566
- Publication date Dec 1, 2011
- KLA-Tencor Corporation
- Ilya V. Bezel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR A...
- Publication number 20110142327
- Publication date Jun 16, 2011
- KLA-Tencor Technologies Corporation
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR A...
- Publication number 20080205745
- Publication date Aug 28, 2008
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING

Eugene Shifrin

Person

Patents Grantslast 30 patents

High efficiency laser-sustained plasma light source with collection...

Print check repeater defect detection

Repeater defect detection

Differential imaging for single-path optical wafer inspection

System, method and non-transitory computer readable medium for tuni...

Plasma cell for providing VUV filtering in a laser-sustained plasma...

High efficiency laser-sustained plasma light source

Neutral atom imaging system

System and method for pumping laser sustained plasma and enhancing...

System, method and non-transitory computer readable medium for tuni...

Repeater defect detection

System and method for separation of pump light and collected light...

High sensitivity repeater defect detection

Continuous-wave laser-sustained plasma illumination source

Continuous-wave laser-sustained plasma illumination source

Continuous-wave laser-sustained plasma illumination source

Plasma cell for providing VUV filtering in a laser-sustained plasma...

Array mode repeater detection

Repeater detection

System and method for enhanced defect detection with a digital matc...

Defect detection using structural information

System and method for separation of pump light and collected light...

Detecting defects on a wafer

Inspection recipe setup from reference image variation

Wafer inspection using free-form care areas

Automated inspection scenario generation

Multi-wavelength pumping to sustain hot plasma

Methods for accurate identification of an edge of a care area for a...

Methods and systems for determining a position of inspection data i...

Methods for accurate identification of an edge of a care area for a...

Patents Applicationslast 30 patents

MULTIMODE DEFECT DETECTION

PRINT CHECK REPEATER DEFECT DETECTION

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

High Efficiency Laser-Sustained Plasma Light Source

SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...

Repeater Defect Detection

Differential Imaging For Single-Path Optical Wafer Inspection

Neutral Atom Imaging System

System and Method for Pumping Laser Sustained Plasma and Enhancing...

Continuous-Wave Laser-Sustained Plasma Illumination Source

Repeater Defect Detection

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...

HIGH SENSITIVITY REPEATER DEFECT DETECTION

System and Method for Separation of Pump Light and Collected Light...

High Efficiency Laser-Sustained Plasma Light Source

Continuous-Wave Laser-Sustained Plasma Illumination Source

System and Method for Enhanced Defect Detection with a Digital Matc...

Defect Detection Using Structural Information

Repeater Detection

Array Mode Repeater Detection

Inspection Recipe Setup from Reference Image Variation

System and Method for Separation of Pump Light and Collected Light...

Methods and Systems for Detecting Repeating Defects on Semiconducto...

Wafer Inspection Using Free-Form Care Areas

Automated Inspection Scenario Generation

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

Multi-Wavelength Pumping to Sustain Hot Plasma

METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR A...

METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR A...