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Eui-Hyeok Yang
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Stevenson Ranch, CA, US
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last 30 patents
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Patent Grant
Wafer-level transfer of membranes with gas-phase etching and wet et...
Patent number
7,268,081
Issue date
Sep 11, 2007
California Institute of Technology
Eui-Hyeok Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Wafer-level transfer of membranes with gas-phase etching and wet et...
Publication number
20040063322
Publication date
Apr 1, 2004
Eui-Hyeok Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY