Eunwoo LEE

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Seongnam-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for monitoring substrate processing apparatus
- Patent number 12,068,140
- Issue date Aug 20, 2024
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching substrate
- Patent number 10,643,858
- Issue date May 5, 2020
- Samsung Electronics Co., Ltd.
- Eunwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, method of managing the same and method...
- Patent number 9,859,175
- Issue date Jan 2, 2018
- SAMSUNG ELECTRONICS CO., LTD.
- Kiwook Song
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
- Publication number 20240371611
- Publication date Nov 7, 2024
- Samsung Electronics Co., Ltd.
- SEJIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
- Publication number 20220199374
- Publication date Jun 23, 2022
- Samsung Electronics Co., Ltd.
- SEJIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING SUBSTRATE
- Publication number 20190109010
- Publication date Apr 11, 2019
- Samsung Electronics Co., Ltd.
- EUNWOO LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD OF MANAGING THE SAME AND METHOD...
- Publication number 20160372386
- Publication date Dec 22, 2016
- Samsung Electronics Co., Ltd.
- Kiwook SONG
- B08 - CLEANING