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Evangelos T. Spyropoulos
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Hybrid flow metrology for improved chamber matching
Patent number
10,760,944
Issue date
Sep 1, 2020
Lam Research Corporation
Evangelos T. Spyropoulos
G01 - MEASURING TESTING
Information
Patent Grant
Methods and apparatus for supplying process gas in a plasma process...
Patent number
10,002,747
Issue date
Jun 19, 2018
Lam Research Corporation
Iqbal Shareef
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Metrology method for transient gas flow
Patent number
9,778,083
Issue date
Oct 3, 2017
Lam Research Corporation
Evangelos Spyropoulos
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Systems and methods for providing gases to a process chamber
Patent number
9,721,763
Issue date
Aug 1, 2017
Lam Research Corporation
Iqbal Shareef
G05 - CONTROLLING REGULATING
Information
Patent Grant
Ultrasonic cleaning method and apparatus therefore
Patent number
9,364,870
Issue date
Jun 14, 2016
Lam Research Corporation
Evangelos T. Spyropoulos
B08 - CLEANING
Information
Patent Grant
Ultrasonic cleaning method and apparatus therefore
Patent number
9,174,249
Issue date
Nov 3, 2015
Lam Research Corporation
Evangelos T. Spyropoulos
B08 - CLEANING
Information
Patent Grant
Gas supply systems for substrate processing chambers and methods th...
Patent number
9,090,972
Issue date
Jul 28, 2015
Lam Research Corporation
Iqbal Shareef
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shared gas panels in plasma processing chambers employing multi-zon...
Patent number
9,091,397
Issue date
Jul 28, 2015
Lam Research Corporation
Iqbal Shareef
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Patents Applications
last 30 patents
Information
Patent Application
FLOW METROLOGY CALIBRATION FOR IMPROVED PROCESSING CHAMBER MATCHING...
Publication number
20220333972
Publication date
Oct 20, 2022
LAM RESEARCH CORPORATION
Evangelos T. SPYROPOULOS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID FLOW METROLOGY FOR IMPROVED CHAMBER MATCHING
Publication number
20200049547
Publication date
Feb 13, 2020
LAM RESEARCH CORPORATION
Evangelos T. SPYROPOULOS
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE
Publication number
20160045941
Publication date
Feb 18, 2016
LAM RESEARCH CORPORATION
Evangelos T. Spyropoulos
B08 - CLEANING
Information
Patent Application
SYSTEMS AND METHODS FOR PROVIDING GASES TO A PROCESS CHAMBER
Publication number
20150303035
Publication date
Oct 22, 2015
LAM RESEARCH CORPORATION
Iqbal Shareef
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METROLOGY METHOD FOR TRANSIENT GAS FLOW
Publication number
20140343875
Publication date
Nov 20, 2014
LAM RESEARCH CORPORATION
Evangelos Spyropoulos
G01 - MEASURING TESTING
Information
Patent Application
GAS SUPPLY SYSTEMS FOR SUBSTRATE PROCESSING CHAMBERS AND METHODS TH...
Publication number
20140182689
Publication date
Jul 3, 2014
LAM RESEARCH CORPORATION
Iqbal Shareef
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE
Publication number
20140158153
Publication date
Jun 12, 2014
LAM RESEARCH CORPORATION
Evangelos T. Spyropoulos
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Application
SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZON...
Publication number
20130255782
Publication date
Oct 3, 2013
Iqbal Shareef
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Application
METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESS...
Publication number
20130255883
Publication date
Oct 3, 2013
Iqbal A. Shareef
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...