Evegeny Churin

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-spot scanning collection optics
- Patent number 9,970,883
- Issue date May 15, 2018
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS
Information Patent Grant
Multi-spot scanning collection optics
- Patent number 9,546,962
- Issue date Jan 17, 2017
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-SPOT SCANNING COLLECTION OPTICS
- Publication number 20170115232
- Publication date Apr 27, 2017
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS
Information Patent Application
MULTI-SPOT SCANNING COLLECTION OPTICS
- Publication number 20150226677
- Publication date Aug 13, 2015
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS