Evert Hendrink Jan Draaijer

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, position quantity detection system and method
- Patent number 7,271,917
- Issue date Sep 18, 2007
- ASML Netherlands B.V.
- Edwin Teunis Van Donkelaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY