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Evert H.J. Draaijer
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Support device, lithographic apparatus and device manufacturing method
Patent number
9,977,349
Issue date
May 22, 2018
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,721,036
Issue date
Apr 13, 2004
ASML Netherlands B.V.
Arie C. Scheiberlich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUPPORT DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160334718
Publication date
Nov 17, 2016
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, position quantity detection system and method
Publication number
20060250617
Publication date
Nov 9, 2006
ASML NETHERLANDS B.V.
Edwin Teunis Van Donkelaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, immersion projection apparatus and device m...
Publication number
20060215131
Publication date
Sep 28, 2006
ASML NETHERLANDS B.V.
Jan-Gerard Cornelis Van Der Toorn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050012912
Publication date
Jan 20, 2005
ASML NETHERLANDS B.V.
Evert Hendrik Jan Draaijer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020039694
Publication date
Apr 4, 2002
Arie C. Scheiberlich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY