Evgenii Dmitreevitch Korop

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Troitsk, RU

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Patents Grantslast 30 patents

Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number RE41362
- Issue date Jun 1, 2010
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- 250 - Radiant energy
Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number 6,818,912
- Issue date Nov 16, 2004
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number 6,667,484
- Issue date Dec 23, 2003
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Radiation source, lithographic apparatus, device manufacturing meth...
- Publication number 20040089819
- Publication date May 13, 2004
- ASML NETHERLANDS B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source, lithographic apparatus, device manufacturing meth...
- Publication number 20020021430
- Publication date Feb 21, 2002
- Konstantin Nikolaevitch Koshelev
- B82 - NANO-TECHNOLOGY