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Evgeniia Butaeva
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Material recovery systems for optical components
Patent number
11,715,622
Issue date
Aug 1, 2023
KLA Corporation
Gildardo Delgado
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
System and method for protecting optics from vacuum ultraviolet light
Patent number
11,262,664
Issue date
Mar 1, 2022
KLA Corporation
Matthew Derstine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Boron-Coated Back-Illuminated Image Sensor With Fluoride-Based Anti...
Publication number
20240243143
Publication date
Jul 18, 2024
KLA Corporation
Evgeniia Butaeva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ION-ASSISTED DEPOSITION OF OPTICAL COATINGS
Publication number
20220316045
Publication date
Oct 6, 2022
Guorong Vera Zhuang
G02 - OPTICS
Information
Patent Application
PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATIO...
Publication number
20220066071
Publication date
Mar 3, 2022
KLA Corporation
Evgeniia Butaeva
C01 - INORGANIC CHEMISTRY
Information
Patent Application
FLUORINE-DOPED OPTICAL MATERIALS FOR OPTICAL COMPONENTS
Publication number
20220049345
Publication date
Feb 17, 2022
KLA Corporation
Gildardo Delgado
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MATERIAL RECOVERY SYSTEMS FOR OPTICAL COMPONENTS
Publication number
20220044905
Publication date
Feb 10, 2022
KLA Corporation
Gildardo Delgado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR PROTECTING OPTICS FROM VACUUM ULTRAVIOLET LIGHT
Publication number
20210149315
Publication date
May 20, 2021
KLA Corporation
Matthew Derstine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY