Evgeny Dmitrievich Korop

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Troitsk, RU

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 8,294,128
- Issue date Oct 23, 2012
- ASML Netherlands B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 7,825,390
- Issue date Nov 2, 2010
- ASML Netherlands B.V.
- Vladimir Mihallovitch Krivtsun
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Apparatus with plasma radiation source and method of forming a beam...
- Publication number 20080192218
- Publication date Aug 14, 2008
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY