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Fa-Yuan Chang
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Taipei, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor fabrication method suitable for MEMS
Patent number
8,084,361
Issue date
Dec 27, 2011
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Cheng Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for wafer bonding
Patent number
7,732,299
Issue date
Jun 8, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Fa-Yuan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultra-fine pitch probe card structure
Patent number
7,696,766
Issue date
Apr 13, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsu Ming Cheng
G01 - MEASURING TESTING
Information
Patent Grant
Wafer transfer system with temperature control apparatus
Patent number
6,679,064
Issue date
Jan 20, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Wei Chang
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
In-situ sequential silicon containing hard mask layer/silicon layer...
Patent number
6,069,091
Issue date
May 30, 2000
Taiwan Semiconductor Manufacturing Company, Ltd.
Fa-Yuan Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR FABRICATION METHOD SUITABLE FOR MEMS
Publication number
20080299769
Publication date
Dec 4, 2008
Taiwan Semiconductor Manufacturing Co., LTD
Tsung-Cheng Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process For Wafer Bonding
Publication number
20080194076
Publication date
Aug 14, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Fa-Yuan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Ultra-fine pitch probe card structure
Publication number
20080180123
Publication date
Jul 31, 2008
Hsu Ming Cheng
G01 - MEASURING TESTING
Information
Patent Application
Three dimensional structure formed by using an adhesive silicon waf...
Publication number
20060189023
Publication date
Aug 24, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Fa-Yuan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Deep trench etching using HDP chamber
Publication number
20050029221
Publication date
Feb 10, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Fa-Yuan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER TRANSFER SYSTEM WITH TEMPERATURE CONTROL APPARATUS
Publication number
20030209014
Publication date
Nov 13, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Wei Chang
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...