TREA

Fabian Haacker

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  • Aalen, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for illuminating an object field of a projection exposure sy...
    • Patent number 10,409,167
    • Issue date Sep 10, 2019
    • Carl Zeiss SMT GmbH
    • Martin Endres
    • G02 - OPTICS
  • Information Patent Grant

    Mirror device
    • Patent number 10,101,507
    • Issue date Oct 16, 2018
    • Carl Zeiss SMT GmbH
    • Yanko Sarov
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mirror array
    • Patent number 9,874,819
    • Issue date Jan 23, 2018
    • Carl Zeiss SMT GmbH
    • Stig Bieling
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Optical component
    • Patent number 9,851,555
    • Issue date Dec 26, 2017
    • Carl Zeiss SMT GmbH
    • Markus Holz
    • B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents