Fabian Koehler

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Gate encapsulation achieved by single-step deposition
- Patent number 9,064,891
- Issue date Jun 23, 2015
- GLOBALFOUNDRIES Inc.
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition with improved in-wafer uniformity
- Patent number 9,018,106
- Issue date Apr 28, 2015
- GLOBALFOUNDRIES Inc.
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating integrated circuits having improved spacers
- Patent number 8,716,149
- Issue date May 6, 2014
- GLOBALFOUNDRIES, INC.
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for encapsulating a high-K gate stack by forming a liner at...
- Patent number 7,897,450
- Issue date Mar 1, 2011
- GLOBALFOUNDRIES Inc.
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GATE ENCAPSULATION ACHIEVED BY SINGLE-STEP DEPOSITION
- Publication number 20150024560
- Publication date Jan 22, 2015
- GLOBALFOUNDRIES INC.
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS HAVING IMPROVED SPACERS
- Publication number 20130323923
- Publication date Dec 5, 2013
- GLOBALFOUNDRIES INC.
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING THIN LAYERS BY A THERMALLY ACTIVATED PROCESS USIN...
- Publication number 20090246371
- Publication date Oct 1, 2009
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ENCAPSULATING A HIGH-K GATE STACK BY FORMING A LINER AT...
- Publication number 20090242999
- Publication date Oct 1, 2009
- Fabian Koehler
- H01 - BASIC ELECTRIC ELEMENTS