Fabian Schuster

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Bad Buchau, DE

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Patents Grantslast 30 patents

Information Patent Grant
Mirror for an illumination optical unit of a projection exposure ap...
- Patent number 12,111,578
- Issue date Oct 8, 2024
- Carl Zeiss SMT GmbH
- Christof Jalics
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MACHINING A WORKPIECE
- Publication number 20240411234
- Publication date Dec 12, 2024
- Carl Zeiss SMT GMBH
- Tobias MEISCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE AP...
- Publication number 20210263423
- Publication date Aug 26, 2021
- Carl Zeiss SMT GMBH
- Christof Jalics
- G02 - OPTICS