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Fabien FILHOL
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VALENCE, FR
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last 30 patents
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Patent Grant
Microelectromechanical system and fabricating process having decoup...
Patent number
9,731,958
Issue date
Aug 15, 2017
Thales
Fabien Filhol
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
MEMS angular inertial sensor operating in tuning fork mode
Patent number
9,574,879
Issue date
Feb 21, 2017
Thales
Bernard Chaumet
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
MICROELECTROMECHANICAL SYSTEM AND FABRICATING PROCESS
Publication number
20170107098
Publication date
Apr 20, 2017
THALES
Fabien FILHOL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ANGULAR INERTIAL SENSOR OPERATING IN TUNING FORK MODE
Publication number
20150377621
Publication date
Dec 31, 2015
THALES
Bernard CHAUMET
G01 - MEASURING TESTING