Fabio E. Zocchi

Person

Parini, IT

People

Patents Grantslast 30 patents

Information Patent Grant
Source-collector module with GIC mirror and LPP EUV light source
- Patent number 9,057,962
- Issue date Jun 16, 2015
- Media Lario S.r.l.
- Natale M. Ceglio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source-collector modules for EUV lithography employing a GIC mirror...
- Patent number 8,895,946
- Issue date Nov 25, 2014
- Media Lario S.r.l.
- Natale M. Ceglio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal management systems, assemblies and methods for grazing inci...
- Patent number 8,746,975
- Issue date Jun 10, 2014
- Media Lario S.r.l.
- Giovanni Bianucci
- G02 - OPTICS
Information Patent Grant
Source-collector module with GIC mirror and tin vapor LPP target sy...
- Patent number 8,686,381
- Issue date Apr 1, 2014
- Media Lario S.r.l.
- Richard Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Grazing incidence collector optical systems for EUV and X-ray appli...
- Patent number 8,594,277
- Issue date Nov 26, 2013
- Media Lario S.r.l.
- Fabio Zocchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grazing incidence collector for laser produced plasma sources
- Patent number 8,411,815
- Issue date Apr 2, 2013
- Media Lario, S.r.L.
- Ian Wallhead
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Collector optical system
- Patent number 8,390,785
- Issue date Mar 5, 2013
- Media Lario, S. R. L.
- Fabio E. Zocchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source-collector module with GIC mirror and tin rod EUV LPP target...
- Patent number 8,344,339
- Issue date Jan 1, 2013
- Media Lario S.R.L.
- Richard A. Levesque
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source-collector module with GIC mirror and LPP EUV light source
- Patent number 8,330,131
- Issue date Dec 11, 2012
- Media Lario, S.r.L.
- Natale M. Ceglio
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source-collector module with GIC mirror and xenon liquid EUV LPP ta...
- Patent number 8,258,485
- Issue date Sep 4, 2012
- Media Lario S.R.L.
- Richard A. Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Zone-optimized mirrors and optical systems using same
- Patent number 8,050,380
- Issue date Nov 1, 2011
- Media Lario, S.r.L.
- Fabio Zocchi
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Source-collector module wth GIC mirror and LPP EUV light source
- Publication number 20140152967
- Publication date Jun 5, 2014
- Natale M. Ceglio
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Source-collector modules for EUV lithography employing a GIC mirror...
- Publication number 20130207004
- Publication date Aug 15, 2013
- Media Lario, S.R.L.
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Application
THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCI...
- Publication number 20120212719
- Publication date Aug 23, 2012
- Giovanni Bianucci
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and xenon liquid EUV LPP ta...
- Publication number 20120050704
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Source-collector module with GIC mirror and tin rod EUV LPP target...
- Publication number 20120050708
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and xenon ice EUV LPP targe...
- Publication number 20120050706
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and tin wire EUV LPP target...
- Publication number 20120050707
- Publication date Mar 1, 2012
- MEDIA LARIO S.R.L
- Richard A. Levesque
- G02 - OPTICS
Information Patent Application
Source-collector module with GIC mirror and tin vapor LPP target sy...
- Publication number 20110318694
- Publication date Dec 29, 2011
- MEDIA LARIO S.R.L
- Richard Levesque
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Source-collector module with GIC mirror and LPP EUV light source
- Publication number 20110168925
- Publication date Jul 14, 2011
- MEDIA LARIO S.R.L
- Natale M. Ceglio
- G02 - OPTICS
Information Patent Application
GRAZING INCIDENCE COLLECTOR OPTICAL SYSTEMS FOR EUV AND X-RAY APPLI...
- Publication number 20110043779
- Publication date Feb 24, 2011
- Fabio Zocchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAZING INCIDENCE COLLECTOR FOR LASER PRODUCED PLASMA SOURCES
- Publication number 20100303199
- Publication date Dec 2, 2010
- MEDIA LARIO S.R.L
- Ian Wallhead
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Zone-optimized mirrors and optical systems using same
- Publication number 20100284511
- Publication date Nov 11, 2010
- MEDIA LARIO S.R.L
- Fabio Zocchi
- G02 - OPTICS
Information Patent Application
COLLECTOR OPTICAL SYSTEM
- Publication number 20100096557
- Publication date Apr 22, 2010
- Fabio E. Zocchi
- G02 - OPTICS
Information Patent Application
MULTI-REFLECTION OPTICAL SYSTEMS AND THEIR FABRICATION
- Publication number 20100091941
- Publication date Apr 15, 2010
- Fabio E. Zocchi
- G02 - OPTICS

Fabio E. Zocchi

Person

Patents Grantslast 30 patents

Source-collector module with GIC mirror and LPP EUV light source

Source-collector modules for EUV lithography employing a GIC mirror...

Thermal management systems, assemblies and methods for grazing inci...

Source-collector module with GIC mirror and tin vapor LPP target sy...

Grazing incidence collector optical systems for EUV and X-ray appli...

Grazing incidence collector for laser produced plasma sources

Collector optical system

Source-collector module with GIC mirror and tin rod EUV LPP target...

Source-collector module with GIC mirror and LPP EUV light source

Source-collector module with GIC mirror and xenon liquid EUV LPP ta...

Zone-optimized mirrors and optical systems using same

Patents Applicationslast 30 patents

Source-collector module wth GIC mirror and LPP EUV light source

Source-collector modules for EUV lithography employing a GIC mirror...

THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCI...

Source-collector module with GIC mirror and xenon liquid EUV LPP ta...

Source-collector module with GIC mirror and tin rod EUV LPP target...

Source-collector module with GIC mirror and xenon ice EUV LPP targe...

Source-collector module with GIC mirror and tin wire EUV LPP target...

Source-collector module with GIC mirror and tin vapor LPP target sy...

Source-collector module with GIC mirror and LPP EUV light source

GRAZING INCIDENCE COLLECTOR OPTICAL SYSTEMS FOR EUV AND X-RAY APPLI...

GRAZING INCIDENCE COLLECTOR FOR LASER PRODUCED PLASMA SOURCES

Zone-optimized mirrors and optical systems using same

COLLECTOR OPTICAL SYSTEM

MULTI-REFLECTION OPTICAL SYSTEMS AND THEIR FABRICATION