Fahong LI

Follow

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of measuring a focus parameter relating to a structure forme...
- Patent number 11,022,899
- Issue date Jun 1, 2021
- ASML Netherlands B.V.
- Fahong Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating focus measurements, measurement method and me...
- Patent number 10,571,812
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Fahong Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for of Measuring a Focus Parameter Relating to a Structure F...
- Publication number 20200166335
- Publication date May 28, 2020
- ASML NETHERLANDS B.V.
- Fahong LI
- G01 - MEASURING TESTING
Information Patent Application
Method of Calibrating Focus Measurements, Measurement Method and Me...
- Publication number 20190056673
- Publication date Feb 21, 2019
- ASML NETHERLANDS B.V.
- Fahong LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY