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Faisal Yaqoob
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ultrahigh selective nitride etch to form FinFET devices
Patent number
11,469,079
Issue date
Oct 11, 2022
Lam Research Corporation
Kwame Eason
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isotropic atomic layer etch for silicon oxides using no activation
Patent number
10,679,868
Issue date
Jun 9, 2020
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrahigh selective polysilicon etch with high throughput
Patent number
10,283,615
Issue date
May 7, 2019
Novellus Systems, Inc.
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for ultrahigh selective nitride etch
Patent number
10,192,751
Issue date
Jan 29, 2019
Lam Research Corporation
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for achieving ultra-high selectivity while etching silicon n...
Patent number
9,911,620
Issue date
Mar 6, 2018
Lam Research Corporation
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isotropic atomic layer etch for silicon oxides using no activation
Patent number
9,425,041
Issue date
Aug 23, 2016
Lam Research Corporation
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ULTRAHIGH SELECTIVE POLYSILICON ETCH WITH HIGH THROUGHPUT
Publication number
20190221654
Publication date
Jul 18, 2019
Novellus Systems, Inc.
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
Publication number
20180269070
Publication date
Sep 20, 2018
LAM RESEARCH CORPORATION
Kwame Eason
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICO...
Publication number
20180158692
Publication date
Jun 7, 2018
LAM RESEARCH CORPORATION
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR ULTRAHIGH SELECTIVE NITRIDE ETCH
Publication number
20170110335
Publication date
Apr 20, 2017
LAM RESEARCH CORPORATION
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOTROPIC ATOMIC LAYER ETCH FOR SILICON OXIDES USING NO ACTIVATION
Publication number
20160329221
Publication date
Nov 10, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON N...
Publication number
20160247688
Publication date
Aug 25, 2016
LAM RESEARCH CORPORATION
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOTROPIC ATOMIC LAYER ETCH FOR SILICON OXIDES USING NO ACTIVATION
Publication number
20160196969
Publication date
Jul 7, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE NITRIDE ETCH
Publication number
20160181116
Publication date
Jun 23, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
ULTRAHIGH SELECTIVE POLYSILICON ETCH WITH HIGH THROUGHPUT
Publication number
20160064519
Publication date
Mar 3, 2016
LAM RESEARCH CORPORATION
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS