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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method of wet cleaning aluminum chamber parts
Patent number
9,387,521
Issue date
Jul 12, 2016
Lam Research Corporation
Hong Shih
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
Publication number
20140150819
Publication date
Jun 5, 2014
LAM RESEARCH CORPORATION
Hong Shih
B08 - CLEANING