Fan ZHI

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Six-degree-of-freedom displacement measurement method for exposure...
- Patent number 9,995,569
- Issue date Jun 12, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coarse motion and fine motion integrated reticle stage driven by pl...
- Patent number 9,904,183
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetically suspended coarse motion and fine motion integrated ret...
- Patent number 9,791,789
- Issue date Oct 17, 2017
- Tsinghua University
- Ming Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...
- Publication number 20180080757
- Publication date Mar 22, 2018
- TSINGHUA UNIVERSITY
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Application
COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...
- Publication number 20170115580
- Publication date Apr 27, 2017
- TSINGHUA UNIVERSITY
- Yu ZHU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...
- Publication number 20170052461
- Publication date Feb 23, 2017
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY