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Zhubei City, TW
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last 30 patents
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Patent Grant
Wafer surface conditioning for stability in fab environment
Patent number
9,847,302
Issue date
Dec 19, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsiao-Chen Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation method of semiconductor device that includes performing h...
Patent number
9,558,955
Issue date
Jan 31, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Ru-Shang Hsiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-high oxide to photoresist selective etch of high-aspect-ratio...
Patent number
6,486,070
Issue date
Nov 26, 2002
Lam Research Corporation
Chok W. Ho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH METAL G...
Publication number
20160225630
Publication date
Aug 4, 2016
Taiwan Semiconductor Manufacturing Co., LTD
Ru-Shang HSIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer Surface Conditioning for Stability in Fab Environment
Publication number
20150054142
Publication date
Feb 26, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Tsaio-Chen Wu
H01 - BASIC ELECTRIC ELEMENTS