Fang RUAN

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas mixer to enable RPS purging
- Patent number 11,862,475
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical absorption sensor for semiconductor processing
- Patent number 11,848,178
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate having blocked center hole
- Patent number 11,814,716
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate with edge flow control
- Patent number 11,810,764
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber components for gas delivery modulation
- Patent number 11,804,363
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cover wafer for semiconductor processing chamber
- Patent number 11,682,544
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clean processes for boron carbon film deposition
- Patent number 11,613,808
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing systems and methods to control process drift
- Patent number 11,430,641
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Vivien Chua
- B08 - CLEANING
Information Patent Grant
Precursor delivery system and methods related thereto
- Patent number 11,009,455
- Issue date May 18, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING
- Publication number 20240079220
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION
- Publication number 20220127722
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXER TO ENABLE RPS PURGING
- Publication number 20220122851
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20220122822
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- B08 - CLEANING
Information Patent Application
MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER
- Publication number 20220108891
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE WITH EDGE FLOW CONTROL
- Publication number 20210335574
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE HAVING BLOCKED CENTER HOLE
- Publication number 20210156028
- Publication date May 27, 2021
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION
- Publication number 20210142984
- Publication date May 13, 2021
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS
- Publication number 20210143029
- Publication date May 13, 2021
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING
- Publication number 20210134568
- Publication date May 6, 2021
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE
- Publication number 20200266064
- Publication date Aug 20, 2020
- Applied Materials, Inc.
- Rajaram NARAYANAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECURSOR DELIVERY SYSTEM AND METHODS RELATED THERETO
- Publication number 20200041407
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Gas mixer to enable RPS purging

Optical absorption sensor for semiconductor processing

Faceplate having blocked center hole

Faceplate with edge flow control

Chamber components for gas delivery modulation

Gas delivery systems and methods

Cover wafer for semiconductor processing chamber

Clean processes for boron carbon film deposition

Processing systems and methods to control process drift

Precursor delivery system and methods related thereto

Patents Applicationslast 30 patents

OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING

CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION

GAS MIXER TO ENABLE RPS PURGING

COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER

MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER

FACEPLATE WITH EDGE FLOW CONTROL

FACEPLATE HAVING BLOCKED CENTER HOLE

CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION

GAS DELIVERY SYSTEMS AND METHODS

OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING

METHOD OF PROCESSING A SUBSTRATE

PRECURSOR DELIVERY SYSTEM AND METHODS RELATED THERETO