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Fangfu LI
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System for evacuating a chamber
Patent number
11,830,701
Issue date
Nov 28, 2023
ASML Netherlands B.V.
Fangfu Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for dynamically compensating position errors of a sample
Patent number
11,127,618
Issue date
Sep 21, 2021
ASML Netherlands B.V.
Fangfu Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for evacuating a chamber
Patent number
10,943,761
Issue date
Mar 9, 2021
ASML Netherlands B.V.
Fangfu Li
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM FOR EVACUATING A CHAMBER
Publication number
20210217579
Publication date
Jul 15, 2021
ASML Netherlands B.V.
Fangfu LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR EVACUATING A CHAMBER
Publication number
20200105496
Publication date
Apr 2, 2020
ASML NETHERLANDS B.V.
Fangfu LI
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
SYSTEM FOR DYNAMICALLY COMPENSATING POSITION ERRORS OF A SAMPLE
Publication number
20190198372
Publication date
Jun 27, 2019
ASML Netherlands B.V.
Fangfu LI
H01 - BASIC ELECTRIC ELEMENTS