Farahmand E. Askarinam

Follow

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor having RF power applicator and a dual-purpose window
- Patent number 6,790,311
- Issue date Sep 14, 2004
- Kenneth S Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for heating a semiconductor wafer plasma react...
- Patent number 6,759,624
- Issue date Jul 6, 2004
- Ananda H. Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor having a dual mode RF power application
- Patent number 6,365,063
- Issue date Apr 2, 2002
- Applied Materials, Inc.
- Kenneth S Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for heating a semiconductor wafer plasma react...
- Publication number 20030209526
- Publication date Nov 13, 2003
- APPLIED MATERIALS, INC.
- Ananda H. Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Top gas feed lid for semiconductor processing chamber
- Publication number 20030037879
- Publication date Feb 27, 2003
- APPLIED MATERIALS, INC.
- Farahmand E. Askarinam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma reactor having RF power applicator and a dual-purpose window
- Publication number 20020096259
- Publication date Jul 25, 2002
- APPLIED MATERIALS, INC.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CONTROL APPARATUS FOR INDUCTIVELY COUPLED RF PLASMA REACTOR...
- Publication number 20010054483
- Publication date Dec 27, 2001
- KENNETH S. COLLINS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...