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Farhan Ahmad
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Singapore, SG
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last 30 patents
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Patent Grant
High density plasma CVD process for gapfill into high aspect ratio...
Patent number
6,802,944
Issue date
Oct 12, 2004
Applied Materials, Inc.
Farhan Ahmad
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
High density plasma CVD process for gapfill into high aspect ratio...
Publication number
20040079632
Publication date
Apr 29, 2004
Applied Materials, Inc.
Farhan Ahmad
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...