Farhat Quli

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process temperature measurement device fabrication techniques and m...
- Patent number 11,784,071
- Issue date Oct 10, 2023
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process temperature measurement device fabrication techniques and m...
- Patent number 11,749,544
- Issue date Sep 5, 2023
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mitigating thermal expansion mismatch in temperature probe construc...
- Patent number 11,688,614
- Issue date Jun 27, 2023
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating particle size standards on substrates
- Patent number 11,385,187
- Issue date Jul 12, 2022
- KLA Corporation
- Farhat Quli
- G01 - MEASURING TESTING
Information Patent Grant
Process temperature measurement device fabrication techniques and m...
- Patent number 11,315,811
- Issue date Apr 26, 2022
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for fabricating semiconductor wafer features havi...
- Patent number 10,796,969
- Issue date Oct 6, 2020
- KLA-Tencor Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch-resistant coating on sensor wafers for in-situ measurement
- Patent number 10,720,350
- Issue date Jul 21, 2020
- KLA-TENCORE CORPORATION
- Andrew Nguyen
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for measuring heat flux
- Patent number 9,719,867
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Stephen Sharratt
- G01 - MEASURING TESTING
Information Patent Grant
Film thickness monitor
- Patent number 9,360,302
- Issue date Jun 7, 2016
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Grant
High temperature sensor wafer for in-situ measurements in active pl...
- Patent number 9,222,842
- Issue date Dec 29, 2015
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Process condition measuring device (PCMD) and method for measuring...
- Patent number 9,134,186
- Issue date Sep 15, 2015
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Process Temperature Measurement Device Fabrication Techniques and M...
- Publication number 20220399216
- Publication date Dec 15, 2022
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MITIGATING THERMAL EXPANSION MISMATCH IN TEMPERATURE PROBE CONSTRUC...
- Publication number 20220351989
- Publication date Nov 3, 2022
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CONDITION SENSING APPARATUS
- Publication number 20220223441
- Publication date Jul 14, 2022
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR CONFIGURATION FOR PROCESS CONDITION MEASURING DEVICES
- Publication number 20220189803
- Publication date Jun 16, 2022
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shape-Distortion Standards for Calibrating Measurement Tools for No...
- Publication number 20200135519
- Publication date Apr 30, 2020
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING SEMICONDUCTOR WAFER FEATURES HAVI...
- Publication number 20200083122
- Publication date Mar 12, 2020
- KLA-Tencor Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process Temperature Measurement Device Fabrication Techniques and M...
- Publication number 20200083072
- Publication date Mar 12, 2020
- KLA Corporation
- Farhat A. Quli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Measuring Heat Flux
- Publication number 20140355643
- Publication date Dec 4, 2014
- KLA-Tencor Corporation
- Stephen Sharratt
- G01 - MEASURING TESTING
Information Patent Application
HIGH TEMPERATURE SENSOR WAFER FOR IN-SITU MEASUREMENTS IN ACTIVE PL...
- Publication number 20140192840
- Publication date Jul 10, 2014
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MONITOR
- Publication number 20130155390
- Publication date Jun 20, 2013
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING...
- Publication number 20120203495
- Publication date Aug 9, 2012
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Application
ETCH-RESISTANT COATING ON SENSOR WAFERS FOR IN-SITU MEASUREMENT
- Publication number 20120074514
- Publication date Mar 29, 2012
- KLA-Tencor Corporation
- ANDREW NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS

Farhat Quli

Person

Patents Grantslast 30 patents

Process temperature measurement device fabrication techniques and m...

Process temperature measurement device fabrication techniques and m...

Mitigating thermal expansion mismatch in temperature probe construc...

Method of fabricating particle size standards on substrates

Process temperature measurement device fabrication techniques and m...

System and method for fabricating semiconductor wafer features havi...

Etch-resistant coating on sensor wafers for in-situ measurement

Method and system for measuring heat flux

Film thickness monitor

High temperature sensor wafer for in-situ measurements in active pl...

Process condition measuring device (PCMD) and method for measuring...

Patents Applicationslast 30 patents

Process Temperature Measurement Device Fabrication Techniques and M...

MITIGATING THERMAL EXPANSION MISMATCH IN TEMPERATURE PROBE CONSTRUC...

PROCESS CONDITION SENSING APPARATUS

SENSOR CONFIGURATION FOR PROCESS CONDITION MEASURING DEVICES

Shape-Distortion Standards for Calibrating Measurement Tools for No...

SYSTEM AND METHOD FOR FABRICATING SEMICONDUCTOR WAFER FEATURES HAVI...

Process Temperature Measurement Device Fabrication Techniques and M...

Method and System for Measuring Heat Flux

HIGH TEMPERATURE SENSOR WAFER FOR IN-SITU MEASUREMENTS IN ACTIVE PL...

FILM THICKNESS MONITOR

PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING...

ETCH-RESISTANT COATING ON SENSOR WAFERS FOR IN-SITU MEASUREMENT