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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Electron beam dose control for scanning electron microscopy and cri...
Patent number
6,211,518
Issue date
Apr 3, 2001
KLA-Tencor Corporation
Neil Richardson
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam dose control for scanning electron microscopy and cri...
Patent number
5,869,833
Issue date
Feb 9, 1999
KLA-Tencor Corporation
Neil Richardson
H01 - BASIC ELECTRIC ELEMENTS